Microheaters based on ultrasonic actuation of piezoceramic elements
نویسندگان
چکیده
منابع مشابه
Microheaters based on ultrasonic actuation of piezoceramic elements
This paper describes the use of micromachined lead zirconate titanate (PZT) piezoceramic elements for heat generation by ultrasonic energy dissipated within the elements and surrounding media. Simulations based on three-dimensional finite-element models suggest that circular disk-shaped elements provide superior steady-state temperature rise for a given cross-sectional area, volume of the PZT e...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2011
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/21/8/085030